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SME MS900473
- The Integration Of Automated Defect Inspection Into The Defect Density Engineering Strategy Of A Manufacturing Line
- standard by Society of Manufacturing Engineers, 06/01/1990
- Publisher: SME
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This paper describes the integration of an automated, patterned wafer, defect inspection system into the overall defect density engineering strategy for a wafer manufacturing area. These systems are now capable of efficiently collecting statistically representative data directly from product material. The core of this strategy is the routine sampling and in-line defect inspection of production material. This enables rapid, early detection of defects in the manufacturing line and the development of a systematic response to the problems that are observed. In addition, this sampling plan drives continuous improvement of defectivity within the wafer manufacturing area.
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