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SME MS900219
- A Graphical Language For Distributed Control Of
- standard by Society of Manufacturing Engineers, 06/01/1990
- Publisher: SME
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THIS PAPER PRESENTS A NOVEL LANGUAGE WHICH PROVIDES A HIGH LEVEL PROGRAMMING ENVIRONMENT FOR COMMUNICATION TO SEMICONDUCTOR EQUIPMENT VIA THE SECS PROTOCOL. IT ALLOWS FOR COMMUNICATION TO MULTIPLE SECS EQUIPMENT TO BE PROGRAMMED FROM A SINGLE PC. PROVISION IS MADE FOR PARALLEL PROCESSING, SYNCHRONIZATION AMONG EXECUTION PATHS, AND OTHER REAL-TIME CONTROL CONSTRUCTS.
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