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IEST RP-CC026.2
- Cleanroom Operations
- Recommended Practice by Institute of Environmental Sciences and Technology, 09/01/2004
- Publisher: IEST
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This RP presents guidelines for maintaining cleanroom integrity at all times, including during routine maintenance, modifications, and equipment replacement. The document provides a basis for preparing standard operating procedures for any cleanroom. It also outlines test procedures for verifying cleanliness of cleanroom apparatus and surfaces.
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